{"id":57,"date":"2015-05-31T19:45:15","date_gmt":"2015-05-31T19:45:15","guid":{"rendered":"https:\/\/arcofluidconsulting.com\/?page_id=57"},"modified":"2015-07-28T15:29:00","modified_gmt":"2015-07-28T15:29:00","slug":"phoenics-cvd","status":"publish","type":"page","link":"https:\/\/arcofluidconsulting.com\/index.php\/phoenics-cvd\/","title":{"rendered":"Phoenics CVD"},"content":{"rendered":"<div id=\"pl-57\"  class=\"panel-layout\" ><div id=\"pg-57-0\"  class=\"panel-grid panel-no-style\" ><div id=\"pgc-57-0-0\"  class=\"panel-grid-cell\" ><div id=\"panel-57-0-0-0\" class=\"so-panel widget widget_headline-widget panel-first-child panel-last-child\" data-index=\"0\" >\t\t<h1>PHOENICS FOR CHEMICAL VAPOR DEPOSITION (CVD)<\/h1>\n\t\t<div class=\"decoration\"><div class=\"decoration-inside\"><\/div><\/div>\n\t\t<h3>Crystal Growth Modeling<\/h3>\n\t\t<\/div><\/div><\/div><div id=\"pg-57-1\"  class=\"panel-grid panel-no-style\" ><div id=\"pgc-57-1-0\"  class=\"panel-grid-cell\" ><div id=\"panel-57-1-0-0\" class=\"so-panel widget widget_black-studio-tinymce widget_black_studio_tinymce panel-first-child panel-last-child\" data-index=\"1\" ><div class=\"panel-widget-style panel-widget-style-for-57-1-0-0\" ><div class=\"textwidget\"><p><div id=\"attachment_177\" style=\"width: 310px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDSILANE.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-177\" class=\"size-medium wp-image-177\" src=\"https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDSILANE-300x111.jpg\" alt=\"CVD SILANE\" width=\"300\" height=\"111\" srcset=\"https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDSILANE-300x111.jpg 300w, https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDSILANE-1024x379.jpg 1024w, https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDSILANE.jpg 1328w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/a><p id=\"caption-attachment-177\" class=\"wp-caption-text\"><span style=\"color: #000000;\">Cutaway diagram of a Jipelec-type CVD reactor used for Si deposition from silane. Contours show silane concentration near the symmetry plane, and silicon deposition rate on the wafer.<\/span><\/p><\/div><\/p>\n<p style=\"text-align: left;\"><span style=\"color: #000000;\"><strong>PHOENICS-CVD has been used to simulate:<\/strong><\/span><\/p>\n<p style=\"text-align: left;\">\u00a0<\/p>\n<ul>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Single-wafer cold-wall silane reactor<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Shower-head reactor; tungsten deposition<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Plasma-enhanced silicon deposition<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">12-wafer reactor; tungsten deposition<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Fraunhofer IIS-B; steady temperature distribution<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Fraunhofer IIS-B; transient temperature distribution<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Silicon nitride formation in a hot wall batch reactor<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Tungsten deposition in a single wafer, cold-wall reactor<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Polysilicon growth in an RTP reactor<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Plasma-enhanced deposition of amorphous silicon<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Polysilicon single wafer reactor processes<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">Metalorganic deposition of titanium nitride<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">SiO2 deposition in a commercial reactor.<\/span><\/li>\n<\/ul>\n<p>\u00a0<\/p>\n<p>\u00a0<\/p>\n<\/div><\/div><\/div><\/div><div id=\"pgc-57-1-1\"  class=\"panel-grid-cell\" ><div id=\"panel-57-1-1-0\" class=\"so-panel widget widget_black-studio-tinymce widget_black_studio_tinymce panel-first-child panel-last-child\" data-index=\"2\" ><h3 class=\"widget-title\">               Complete Design and Analysis Tool for CVD Reactors<\/h3><div class=\"textwidget\"><p>Simulation is used to improve the design of CVD equipment, to reduce the need for prototyping and to answer the \"what if\" questions of engineers.<\/p>\n<p><div id=\"attachment_176\" style=\"width: 114px\" class=\"wp-caption alignright\"><a href=\"https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDreactor.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-176\" class=\"size-full wp-image-176\" src=\"https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDreactor.jpg\" alt=\"CVD reactor\" width=\"104\" height=\"177\" \/><\/a><p id=\"caption-attachment-176\" class=\"wp-caption-text\"><span style=\"color: #0000ff;\">Heated up of a Silicon Wafer Batch in a pre-heated Furnace<\/span><\/p><\/div><\/p>\n<p>Using the PHOENICS-CVD software system engineers can:<\/p>\n<ul>\n<li><span style=\"color: #0000ff;\">optimize CVD reactor design <\/span><\/li>\n<li><span style=\"color: #0000ff;\">tune process parameters to improve yield <\/span><\/li>\n<li><span style=\"color: #0000ff;\">explore new processes before equipment is purchased<\/span><\/li>\n<li style=\"text-align: left;\"><span style=\"color: #0000ff;\">troubleshoot poorly operating processes and equipment<\/span><\/li>\n<\/ul>\n<p><strong>Features<\/strong><\/p>\n<p style=\"text-align: justify;\"><strong>PHOENICS-CVD<\/strong> is an integrated software system designed to simulate the behavior of a wide range of CVD reactors; this involves the modeling of fluid flow and heat transfer in a multi-component gas, including both gas-phase (homogeneous) and surface (heterogeneous) chemical reactions and incorporating plasma effects.<\/p>\n<p style=\"text-align: justify;\">Implementation is by means of a graphical, menu-driven, object-orientated interface, coupled with a library of generic reactor designs providing an easy route to problem set-up and modification.<\/p>\n<p><span style=\"color: #0000ff;\"><strong>PHOENICS-CVD offers:<\/strong> <\/span><\/p>\n<ul>\n<li>Simulation of steady-state or transient (process start-up and shut-down) behavior<\/li>\n<li>Cartesian, Polar or Body-Fitted-Coordinate grids<\/li>\n<li>Multi-component diffusion and gas properties with a choice of models<\/li>\n<li>Thermal diffusion with a choice of options<\/li>\n<li>Gas and surface chemical reactions, with built-in options and the provision for user- coding if required<\/li>\n<li>Surface-to-surface radiation<\/li>\n<li>Plasma modeling using an effective drift-diffusion model<\/li>\n<li>Data files for transport, thermodynamic, material, optical and chemical reaction parameters<\/li>\n<\/ul>\n<h2 style=\"text-align: center;\"><a class=\"fasc-button fasc-size-large fasc-type-glossy fasc-rounded-medium\" style=\"background-color: #33809e; color: #ffffff;\" href=\"https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/phoenicscvd.pdf\" data-fasc-style=\"background-color:#33809e;color:#ffffff;\">Download Technical Description<\/a><\/h2>\n<h2>\u00a0<span style=\"color: #0000ff;\">Validation<\/span><\/h2>\n<p>PHOENICS-CVD has been validated for a range of CVD processes. The development and experimental verification of PHOENICS-CVD are documented in over 20 publications;\u00a0 Contact us for copies.<\/p>\n<h3 style=\"text-align: center;\">[peekaboo_link name=\"car1\"]<span style=\"color: #800000;\"><strong>Contact Sales<\/strong><\/span>[\/peekaboo_link]<\/h3>\n<p>[peekaboo_content name=\"car1\"]<\/p>\n<p><span style=\"font-family: arial,helvetica,sans-serif; font-size: small;\">Thank you for your interest in our products and services.<br \/> <\/span><\/p>\n<table style=\"height: 26px;\" border=\"0\" width=\"292\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td width=\"411\" height=\"20\">\u00a0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><span style=\"font-family: arial,helvetica,sans-serif; font-size: small;\">\u00a0if you would like to speak to a Sales Representative about Phoenics CVD, please fill out the following form:<\/span><\/p>\n<form action=\"\/go\/saveform.do\" autocomplete=\"off\" method=\"POST\" name=\"GSDeployBean\">\n<table style=\"height: 32px;\" border=\"0\" width=\"35\">\n<tbody>\n<tr>\n<td width=\"1%\">\u00a0<\/td>\n<td colspan=\"2\">\u00a0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/form>\n<p>\n<div class=\"wpcf7 no-js\" id=\"wpcf7-f1048-o1\" lang=\"en-US\" dir=\"ltr\" data-wpcf7-id=\"1048\">\n<div class=\"screen-reader-response\"><p role=\"status\" aria-live=\"polite\" aria-atomic=\"true\"><\/p> <ul><\/ul><\/div>\n<form action=\"\/index.php\/wp-json\/wp\/v2\/pages\/57#wpcf7-f1048-o1\" method=\"post\" class=\"wpcf7-form init\" aria-label=\"Contact form\" novalidate=\"novalidate\" data-status=\"init\">\n<fieldset class=\"hidden-fields-container\"><input type=\"hidden\" name=\"_wpcf7\" value=\"1048\" \/><input type=\"hidden\" name=\"_wpcf7_version\" value=\"6.1.5\" \/><input type=\"hidden\" name=\"_wpcf7_locale\" value=\"en_US\" \/><input type=\"hidden\" name=\"_wpcf7_unit_tag\" value=\"wpcf7-f1048-o1\" \/><input type=\"hidden\" name=\"_wpcf7_container_post\" value=\"0\" \/><input type=\"hidden\" name=\"_wpcf7_posted_data_hash\" value=\"\" \/>\n<\/fieldset>\n<p>Your Name (required)\n<\/p>\n<p><span class=\"wpcf7-form-control-wrap\" data-name=\"your-name\"><input size=\"40\" maxlength=\"400\" class=\"wpcf7-form-control wpcf7-text wpcf7-validates-as-required\" aria-required=\"true\" aria-invalid=\"false\" value=\"\" type=\"text\" name=\"your-name\" \/><\/span>\n<\/p>\n<p>Your Email (required)\n<\/p>\n<p><span class=\"wpcf7-form-control-wrap\" data-name=\"your-email\"><input size=\"40\" maxlength=\"400\" class=\"wpcf7-form-control wpcf7-email wpcf7-validates-as-required wpcf7-text wpcf7-validates-as-email\" aria-required=\"true\" aria-invalid=\"false\" value=\"\" type=\"email\" name=\"your-email\" \/><\/span>\n<\/p>\n<p>Your phone (required)\n<\/p>\n<p><span class=\"wpcf7-form-control-wrap\" data-name=\"tel-743\"><input size=\"40\" maxlength=\"400\" class=\"wpcf7-form-control wpcf7-tel wpcf7-validates-as-required wpcf7-text wpcf7-validates-as-tel\" aria-required=\"true\" aria-invalid=\"false\" placeholder=\"\" value=\"\" type=\"tel\" name=\"tel-743\" \/><\/span>\n<\/p>\n<p>Subject (required)\n<\/p>\n<p><span class=\"wpcf7-form-control-wrap\" data-name=\"checkbox-200\"><span class=\"wpcf7-form-control wpcf7-checkbox wpcf7-validates-as-required wpcf7-exclusive-checkbox\"><span class=\"wpcf7-list-item first\"><input type=\"checkbox\" name=\"checkbox-200\" value=\"Flair Datacenter\" \/><span class=\"wpcf7-list-item-label\">Flair Datacenter<\/span><\/span><span class=\"wpcf7-list-item\"><input type=\"checkbox\" name=\"checkbox-200\" value=\"Phoenics CVD\" \/><span class=\"wpcf7-list-item-label\">Phoenics CVD<\/span><\/span><span class=\"wpcf7-list-item\"><input type=\"checkbox\" name=\"checkbox-200\" value=\"Phoenics Wind Tunnel\" \/><span class=\"wpcf7-list-item-label\">Phoenics Wind Tunnel<\/span><\/span><span class=\"wpcf7-list-item last\"><input type=\"checkbox\" name=\"checkbox-200\" value=\"ESTER\" \/><span class=\"wpcf7-list-item-label\">ESTER<\/span><\/span><\/span><\/span>\n<\/p>\n<p><input class=\"wpcf7-form-control wpcf7-submit has-spinner\" type=\"submit\" value=\"Send\" \/>\n<\/p><div class=\"wpcf7-response-output\" aria-hidden=\"true\"><\/div>\n<\/form>\n<\/div>\n<\/p>\n<p style=\"text-align: justify;\">[\/peekaboo_content]<\/p>\n<hr \/>\n<\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"<p>PHOENICS-CVD has been used to simulate:\u00a0Single-wafer cold-wall silane reactorShower-head reactor; tungsten depositionPlasma-enhanced silicon deposition12-wafer reactor; tungsten depositionFraunhofer IIS-B; steady temperature distributionFraunhofer IIS-B; transient temperature distributionSilicon nitride formation in a hot wall batch reactorTungsten deposition in a single wafer, cold-wall reactorPolysilicon growth in an RTP reactorPlasma-enhanced deposition of amorphous siliconPolysilicon single wafer reactor processesMetalorganic deposition of [&hellip;]<\/p>\n","protected":false},"author":4,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"home-panels.php","meta":{"footnotes":""},"class_list":["post-57","page","type-page","status-publish","hentry","post"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.1.1 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>PHOENICS CHEMICAL VAPOR DEPOSITION (CVD) Arcofluid<\/title>\n<meta name=\"description\" content=\"PHOENICS FOR CHEMICAL VAPOR DEPOSITION (CVD)Crystal Growth Modeling. 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Surface to surface radiation, bulk chemical reactions, surface chemical reactions","breadcrumb":{"@id":"https:\/\/arcofluidconsulting.com\/index.php\/phoenics-cvd\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/arcofluidconsulting.com\/index.php\/phoenics-cvd\/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/arcofluidconsulting.com\/index.php\/phoenics-cvd\/#primaryimage","url":"https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDSILANE.jpg","contentUrl":"https:\/\/arcofluidconsulting.com\/wp-content\/uploads\/2015\/06\/CVDSILANE.jpg","width":1328,"height":492,"caption":"Cutaway diagram of a Jipelec-type CVD reactor used for Si deposition from silane. 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